Boca Bearings offers many different bearing styles that are appropriate for use in both semiconductor equipment and semiconductor manufacturing. Ceramic bearings are capable of accommodating the many challenging conditions present during the stages of semiconductor production; from furnace temperatures that can reach close to 2500°F to clean-room 1 air quality.
Ceramic materials commonly used for bearings are Silicon Nitride (Si3N4), Zirconia Oxide (ZrO2), Alumina Oxide (Al2O3) or Silicon Carbide (SiC). Ceramic is non-porous so it is a glass like surface that can be used in clean rooms where traditional lubrications and emissions cannot be present. Ceramic is also non-magnetic, non-corrosive and has an extremely low rate of thermal expansion. As a result ceramic bearings can be used in silicon wafer production where high loads and high temperatures are exhibited during manufacturing. They are also well suited for Wafer Inspection, Wafer Probing, Wafer Repair, and Ion Implantation.
Deep groove bearings, thrust bearings, angular contact bearings and self-aligning bearings are just some of the styles available in Full Ceramic and Ceramic Hybrid versions. Ceramic Hybrid bearings consist of steel races with ceramic balls. Full Ceramic bearings have ceramic races and ceramic balls. Boca Bearings has one of the largest inventories of ceramic bearings in the world but can also have custom bearings built to the specifications of the customer.